JPH0249718Y2 - - Google Patents
Info
- Publication number
- JPH0249718Y2 JPH0249718Y2 JP7094788U JP7094788U JPH0249718Y2 JP H0249718 Y2 JPH0249718 Y2 JP H0249718Y2 JP 7094788 U JP7094788 U JP 7094788U JP 7094788 U JP7094788 U JP 7094788U JP H0249718 Y2 JPH0249718 Y2 JP H0249718Y2
- Authority
- JP
- Japan
- Prior art keywords
- boat
- wafer
- carrier
- wafers
- pusher
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 235000012431 wafers Nutrition 0.000 claims description 146
- 239000004065 semiconductor Substances 0.000 claims description 25
- 230000007246 mechanism Effects 0.000 description 13
- 239000011295 pitch Substances 0.000 description 8
- 238000000034 method Methods 0.000 description 6
- 239000004809 Teflon Substances 0.000 description 3
- 229920006362 Teflon® Polymers 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000003028 elevating effect Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7094788U JPH0249718Y2 (en]) | 1988-05-27 | 1988-05-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7094788U JPH0249718Y2 (en]) | 1988-05-27 | 1988-05-27 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01173942U JPH01173942U (en]) | 1989-12-11 |
| JPH0249718Y2 true JPH0249718Y2 (en]) | 1990-12-27 |
Family
ID=31296160
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7094788U Expired JPH0249718Y2 (en]) | 1988-05-27 | 1988-05-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0249718Y2 (en]) |
-
1988
- 1988-05-27 JP JP7094788U patent/JPH0249718Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01173942U (en]) | 1989-12-11 |
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